SEM physics principal researcher

Are you challenged by demanding projects in a multidisciplinary context? Do you have the technical capabilities to provide innovative solutions? Does contributing to the world’s most advanced lithography machines makes you feel responsible and proud? Then this might be the right opportunity for you.

ASML Research is looking for a Senior Scanning Electron Microscopy (SEM) Specialist to strengthen the Scanning Electron Microscopy Research group, with a specific focus on Electron optics control to improve Imaging performance as well as diagnostics. Within the SEM group, you will contribute to the fundamental understanding and development of novel solutions that advance ASML’s e-beam metrology and inspection products for the semiconductor industry. In this role, you will work in a highly multidisciplinary environment, driving deep understanding of electron imaging effects in real customer use cases. You will translate this understanding into improvements in electron optical design and advanced control strategies for aberrations. Your work will combine modeling, simulation, and hypothesis-driven experimentation, in close collaboration with colleagues in Veldhoven and San Jose (California).

Job Description As a senior specialist, you will play a key role in shaping the direction of system control & diagnostics within ASML’s SEM systems. Your responsibilities include:

Leading and executing electron optical simulations to analyze and predict system behavior

Driving the understanding and mitigation of SEM imaging performance drifts and other robustness challenges, closely collaborating with internal experts

Defining, designing, and validating innovative tool diagnostics & control concepts

Translating customer use cases and device requirements into concrete SEM performance targets

Initiating and guiding experimental validation on ASML e-beam systems, working closely with system and application engineers

Acting as a technical authority within the team, contributing to knowledge sharing and coaching colleagues

Education PhD or Master’s degree (with 5–10 years of relevant experience) in Physics, Mechanical Engineering, Materials Science, or Electrical Engineering, with a strong focus on Scanning Electron Microscopy or electron optics.

Preferred Experience

Proven expertise in electron optical modeling and simulation

Deep knowledge of SEM imaging physics and image processing, diagnostics, and control strategies in SEM systems

Experience bridging theoretical modeling and experimental validation

Familiarity with metrology or inspection systems in the semiconductor industry is a strong plus

Familiarity with High Voltage design & electrostatics is a strong plus

The Research Scanning Electron Microscopy group is part of the Research department of ASML. Its task is to identify and fill in the technological gaps in the future roadmap of lithography and the lithography market. Our focus is on fundamental understanding and novel solution identification for our e-beam metrology systems. We work in small teams and deliver proof of concept solutions that can be transferred to Development and Engineering. We intensively work together with external research institutes and universities.

Strong ownership and ability to drive complex technical topics independently

Collaborative mindset with the ability to influence a multidisciplinary team of experts

Analytical and inquisitive thinker with a pragmatic approach to problem-solving

Comfortable operating at both deep technical level and system-level perspective

Clear and effective communicator across disciplines and organizational levels

Fluent in English

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that inclusion and diversity is a driving force in the success of our company.

Need to know more about applying for a job at ASML? Read our frequently asked questions.